Ceramic end effectors (Ceramic handling arms) are used to manipulate and carry silicon wafers through the entire production within the semiconductor process. It enables the handling of large-size wafers and may be designed with vacuum channels so as to carry the part.

The end effector (ceramic robot hand) constitutes the top of the robot arm which handles and moves the semiconductor wafer between positions. It’s basically the robot’s hand so it's important that it's thermally and dimensionally stable and not contaminate the chamber with particles or chemical contaminants.

We use fined ceramic materials to manufacture semiconductor ceramic arms to reinforce functionality, reduce damage to wafers/glass panels, and stop pollution from spreading.

High heat and temperature resistant

The ceramic handling arm have a excellent high heat temperature resistant ability. ceramic handling arm are often used under 2200 ℃ heat environment.Coefficient of thermal expansion up to 13* 10∧6 from 20°C -1000°C. up to 2800°C freezing point .

Wear and hardness resistant

The ceramic handling arm is better wear and abrasion resistant property than metal. The ceramic handling arm hardness (mohs)up to 9, HRA 80 - 90. ceramic handling arm hardness isn't second only to diamond, but far beyond the wear and tear resistance of steel and chrome steel .

The ceramic robot arm provided by our company is mainly divided into: clamping type, load-bearing type, and vacuum adsorption type.

Supported ceramic materials are: alumina, zirconia, silicon nitride, silicon carbide, etc.

The sizes are: 2", 4", 6", 8", 12", non-standard sizes can be customized.

Welcome to contact us at [email protected] for detailed ceramic arm information.