One of the core semiconductor devices is that the Electro-Static Cerarmic Chucks (E-Chucks). it's been widely utilized in plasma-based and vacuum-based semiconductor processing. The electrostatic chuck plays a crucial role in adsorbing and cooling/heating wafers, and has technical advantages on non-edge exclusion, high reliability, wafer planarity, and particles reduction.

In the semiconductor and optoelectronic industries, very thin wafers are often placed on advanced ceramic breathable chucks, connected to a vacuum generator, and the wafer is fixed by vacuum suction. Johncera special ceramic chucks are convenient for waxing, thinning, and thinning of wafers. Processes such as wax removal, cleaning and cutting.

Our ceramic chuck takes advantage of the properties of porous ceramics. Porous ceramics are formed by continuous holes connecting from the within to the surface like a sponge.

Conventional solutions use channels for air like grooves or holes formed by machining. This leads to issues like deformation of films and thin products getting sucked into the grooves or holes. Our porous ceramics have micron-scale holes across the entire surface enabling even adhesion without deformation of the fixed object.

Product features: a solution that is difficult to absorb with special shapes

●Regional adsorption: work pieces of different sizes can be adsorbed on the same ceramic area

●High heat resistance: it is a high-temperature sintered product, high temperature resistance

●Chemical resistance: acid and alkali resistance

●Lightweight: Because the internal structure is uniform pores, the specific gravity is about 1.6~2.8

●High insulation performance: It is an insulating material, which dissipates static electricity.

●No dust: completely sintered without dust

We handle production of the ceramic chuck from materials to machining enabling us to support a wide range of options.please contact [email protected] for more information.